Selection of 3 block type test gratings with different step heights intended for Z-axis calibration of scanning probe microscopes and linearity measurements.
|Structure:||Si Wafer with SiO2 layer for grating|
|Pattern type:||1-Dimensional (in Z-axis direction)|
20±1.5nm for TGZ-20
|Chip size:||5 x 5 x 0.5mm|
|Effective area:||Central square of 3 x 3mm|
Note: Values for step heights are nominal; actual step height is given with the product and could be ±5%