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629-10
Selection of 3 block type test gratings with different step heights intended for Z-axis calibration of scanning probe microscopes and linearity measurements.
| Structure: | Si Wafer with SiO2 layer for grating |
| Pattern type: | 1-Dimensional (in Z-axis direction) |
| Step heights: |
20±1.5nm for TGZ-20 |
| Period: | 3 ±0.01µm |
| Chip size: | 5 x 5 x 0.5mm |
| Effective area: | Central square of 3 x 3mm |
Note: Values for step heights are nominal; actual step height is given with the product and could be ±5%