Block Test Gratings for Z-axis


  • Selection of 3 block type test gratings with different step heights intended for Z-axis calibration of scanning probe microscopes and linearity measurements.

    Structure: Si Wafer with SiO2 layer for grating
    Pattern type: 1-Dimensional (in Z-axis direction)
    Step heights:

     20±1.5nm for TGZ-20     
    110±2nm for TGZ-100
    520±3nm for TGZ-500

    Period: 3 ±0.01µm
    Chip size: 5 x 5 x 0.5mm
    Effective area: Central square of 3 x 3mm

    Note: Values for step heights are nominal; actual step height is given with the product and could be ±5%