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684-1
NIST traceable* with features from 2mm to 1µm for magnification 10-20,000x (ideal for desktop SEM)
*Uses average data measured for each production wafer.
Feature sizes: 2mm, 1mm, 0.5mm, 0.1mm, 50µm, 10µm, 5µm, 2µm, and 1µm
Pelcotec™ CDMS - XY Critical Dimension Magnification Standard
Available as NIST Traceable or as Certified against NIST Standard
Easy to use and very useful for quick and precise SEM, FESEM, FIB, CD-SEM, LM, and AFM magnification calibration. Scale lines are provided in both X and Y axes for ease of 2 axis calibration without stage rotation.
Fully featured and traceable calibration standards for a wide measurement range. They are made using the latest semiconductor and MEMS manufacturing techniques yielding superior line edge quality.
The Pelcotec™ CDMS - XY Calibration Standard is available with two features size ranges, which are both offered as traceable and as certified standards, making a total of 4 unmounted versions:
Pelcotec™ CDMS-XY-1T; fully traceable with features from 2.0mm to 1um for a magnification range from 10x - 20,000x; ideal for desk top SEMs and low to medium magnification applications
Representative CDMS-XY-1T Traceable Certificate (214KB PDF)
Pelcotec™ CDMS-XY-0.1T; fully traceable with features from 2.0mm to 100nm for a magnification range up to 10 - 200,000x; for all SEM and most FESEM applications
Representative CDMS-XY-0.1T Traceable Certificate (188KB PDF)
Pelcotec™ CDMS-XY-1C; individually certified against a NIST standard with features from 2.0mm to 1µm for a magnification range from 10x - 20,000x; ideal for desk top SEMs and low to medium magnification applications
Representative CDMS-XY-1C Conformance Certificate (270KB PDF)
Pelcotec™ CDMS-XY-0.1C; individually certified against a NIST standard with features from 2.0mm to 100nm for a magnification range up to 10 - 200,000x; for all SEM and most FESEM applications
Representative CDMS-XY-0.1C Conformance Certificate (261KB PDF)
Comparison Table Below
| Pelcotec™ CDMS-XY-1 | Pelcotec™ CDMS-XY-0.1 | |
| Substrate: Silicon | ✓ | ✓ |
| Substrate size: 2.5 x 2.5mm | ✓ | ✓ |
| Substrate thickness: 675 ±10µm | ✓ | ✓ |
| Feature size: 2mm to 1µm | ✓ | ✓ |
| Feature size: 500, 250 and 100nm | — | ✓ |
| Feature material: 50nm Cr (2mm - 5µm) | ✓ | ✓ |
| Feature material: 20nm Cr/50nm Au (2µm and 1µm) | ✓ | ✓ |
| Feature material: 20nm Cr/50nm Au (500, 250 and 100 nm) | — | ✓ |
| NIST traceable | ✓ | ✓ |
| Certification available | ✓ | ✓ |
| Unmounted | ✓ | ✓ |
| Mounts A-R available | ✓ | ✓ |
| Precision better than 0.3% | ✓ | ✓ |
Feature sizes for the Pelcotec™ CDMS-XY-1T and -1C are:
2mm, 1mm, 0.5mm, 0.1mm, 50µm, 10µm, 5µm, 2µm, and 1µm.
Feature sizes for the Pelcotec™ CDMS-XY-0.1T & 0.1C are:
2mm, 1mm, 0.5mm, 0.1mm, 50µm, 10µm, 5µm, 2µm, and 1µm, 500nm, 250nm and 100nm.