689-1

Pelcotec™ CDMS-XY-1C

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  • Certified* against NIST standard with features from 2mm to 1µm for magnification 10-20,000x (ideal for desktop SEM)

    *Each scale calibrated against a NIST measured standard

    Feature sizes: 2mm, 1mm, 0.5mm, 0.1mm, 50µm,10µm, 5µm, 2µm, and 1µm.

    See mount selections, types A-R

  • Pelcotec™ CDMS - XY Critical Dimension Magnification Standard

    Available as NIST Traceable or as Certified against NIST Standard

    Easy to use and very useful for quick and precise SEM, FESEM, FIB, CD-SEM, LM, and AFM magnification calibration. Scale lines are provided in both X and Y axes for ease of 2 axis calibration without stage rotation.

    Fully featured and traceable calibration standards for a wide measurement range. They are made using the latest semiconductor and MEMS manufacturing techniques yielding superior line edge quality.

    The Pelcotec™ CDMS - XY Calibration Standard is available with two features size ranges, which are both offered as traceable and as certified standards, making a total of 4 unmounted versions:

    Pelcotec™ CDMS-XY-1T; fully traceable with features from 2.0mm to 1um for a magnification range from 10x - 20,000x; ideal for desk top SEMs and low to medium magnification applications
    Representative CDMS-XY-1T Traceable Certificate (214KB PDF)

    Pelcotec™ CDMS-XY-0.1T; fully traceable with features from 2.0mm to 100nm for a magnification range up to 10 - 200,000x; for all SEM and most FESEM applications
    Representative CDMS-XY-0.1T Traceable Certificate (188KB PDF)

    Pelcotec™ CDMS-XY-1C; individually certified against a NIST standard with features from 2.0mm to 1µm for a magnification range from 10x - 20,000x; ideal for desk top SEMs and low to medium magnification applications
    Representative CDMS-XY-1C Conformance Certificate (270KB PDF)

    Pelcotec™ CDMS-XY-0.1C; individually certified against a NIST standard with features from 2.0mm to 100nm for a magnification range up to 10 - 200,000x; for all SEM and most FESEM applications
    Representative CDMS-XY-0.1C Conformance Certificate (261KB PDF)

    Comparison Table Below

    Pelcotec™ CDMS-1 Pelcotec™ CDMS-0.1
    Substrate: Silicon
    Substrate size: 2.5 x 2.5mm
    Substrate thickness: 525 ±10µm
    Feature size: 2mm to 1µm
    Feature size: 500, 250 and 100nm
    Feature material: 50nm Cr (2mm - 5µm)
    Feature material: 20nm Cr/50nm Au (2µm and 1µm)
    Feature material: 20nm Cr/50nm Au (500, 250 and 100 nm)
    NIST traceable
    Certification available
    Unmounted
    Mounts A-R available
    Precision better than 0.3%


    Feature sizes for the Pelcotec™ CDMS-XY-1T and -1C are:

    2mm, 1mm, 0.5mm, 0.1mm, 50µm, 10µm, 5µm, 2µm, and 1µm.

    Feature sizes for the Pelcotec™ CDMS-XY-0.1T & 0.1C are:
    2mm, 1mm, 0.5mm, 0.1mm, 50µm, 10µm, 5µm, 2µm, and 1µm, 500nm, 250nm and 100nm.