E-Beam Lithography Mount

SEM Pin Mount Specimen Holders
for Scanning Electron Microscopy

A large selection of SEM specimen holders for SEMs, FESEMs, and FIB systems, which are using the standard 3.2mm (1/8") pin type mount. Some of the larger holders require a larger specimen chamber and a larger stage. Depending on the available distance, Z-movement and maximum specimen height provided by the specimen stage in the SEM, pin stub extenders might be added to obtain the optimized working height. See Hitachi M4 Holders if you have a Hitachi SEM, FESEM, or FIB system. These specimen holders can also be used on JEOL SEMs if a pin mount adapter to JEOL cylinder mount is used (#15362, #15362-12, #15362-15, #16153-9, or #16216-9).
Used on FEI/Philips, ZEISS, LEO, Leica, Cambridge Instruments, CamScan and Tescan SEMs

The E-Beam Lithography Mount comprises:

1. 2 ea PELCO SEMClips™ to hold the sample
2. a Faraday (ø2.5mm with 100µm hole) cup to measure the beam current
3. and a gold on carbon resolution sample (ø3mm) for resolution test

All mounted on a 25mm aluminum pin stub, positioned in such a way as to leave maximum sample space. The height of the gold on carbon test specimen is approximately 0.5mm above the surface of the mount. The Gold on Carbon is similar to #617 with gold particle size range from approx. 5nm to 150nm. Shipped in plastic storage box. Pin length is 8.5mm. Material: Aluminum with copper clips and brass screws.

Screw used is M2 x 3mm, Pan, Brass

E-Beam Lithography Mount, Pin