CDP55L

CDP55L

Round Post Tips for Depth Metrology
Max W = 55 nm, Max EL = 1000 nm

  • Round Post Tips for Depth Metrology
    Max Width = 55 nm
    Max Effective Length = 1000 nm

  • Tip Geometry: Critical Dimension (Overhang)
    Tip Height: 10 - 20
    Tip Set Back( RNG): 5 - 15
  • The Aluminum reflective coating on the backside of the cantilever increases the laser signal (A+B) by up to 2.5 times. It is to assist the machine vision application on Automated AFMs.

    Cantilever Material: 0.010 - 0.025 Ωcm Silicon
    Cantilever Thickness (Nom): 3.3
    Cantilever Thickness (RNG): 2.8 - 3.8
    Cantilever Geometry: Rectangular
    Cantilevers Number: 1
    Back Side Coating: Reflective Aluminum