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629-50
The TGTZ-400 test grating is intended for 3-D visualization of the scanning tip, determination of tip sharpness parameters, tip degradation and contamination control.
| Structure: | Si wafer with grating in top surface |
| Pattern type: | Array of sharp tips |
| Tip angle: | About 50 degrees |
| Tip Radius: | ≤10nm |
| Tip Height: | 0.3 - 0.7µm |
| Period: | 3 ±0.01µm |
| Diagonal period: | 2.12µm |
| Chip size: | 5 x 5 x 0.5mm |
| Effective area: | Central square of 2 x 2mm |