Test Grating for Tip Sharpness


  • The TGTZ-400 test grating is intended for 3-D visualization of the scanning tip, determination of tip sharpness parameters, tip degradation and contamination control.

    Structure: Si wafer with grating in top surface
    Pattern type: Array of sharp tips
    Tip angle: About 50 degrees
    Tip Radius: ≤10nm
    Tip Height: 0.3 - 0.7µm
    Period: 3 ±0.01µm
    Diagonal period: 2.12µm
    Chip size: 5 x 5 x 0.5mm
    Effective area: Central square of 2 x 2mm