The TGTZ-400 test grating is intended for 3-D visualization of the scanning tip, determination of tip sharpness parameters, tip degradation and contamination control.
Structure: | Si wafer with grating in top surface |
Pattern type: | Array of sharp tips |
Tip angle: | About 50 degrees |
Tip Radius: | ≤10nm |
Tip Height: | 0.3 - 0.7µm |
Period: | 3 ±0.01µm |
Diagonal period: | 2.12µm |
Chip size: | 5 x 5 x 0.5mm |
Effective area: | Central square of 2 x 2mm |