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    Test Grating for X-, Y- and Z-direction - Systems for Research
    Test Grating for X-, Y- and Z-direction - Systems for Research
    Test Grating for X-, Y- and Z-direction - Systems for Research
    Test Grating for X-, Y- and Z-direction - Systems for Research

    629-70

    Test Grating for X-, Y- and Z-direction

    $864.00
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    • The TG3D-3000/20 test grating with its truly 3-Dimensional structure is intended for simultaneous calibration in X-, Y- and Z-direction, lateral calibration of SPM scanners and detection of any lateral nonlinearity, hysteresis, creep and cross-coupling effects.

      Structure: Si wafer with SiO2 layer for grating
      Pattern type: 3-Dimensional array of small squares
      Height: 20 ±1.5nm
      Square size: 1.5 ±0.15µm
      Period: 3 ±0.05µm
      Chip size: 5 x 5 x 0.5mm
      Effective area: Central square of 3 x 3mm

      Note: The precision on the height is based on the measurement of 5 gratings (randomly selected from a batch of 300 gratings) by an SPM calibrated by a PTB certified TGZ-20 grating. The basic step height can vary from the specified one within 10% (example: step height can be 22 ±1.5nm).