Calibration artifact: 180nm step height, 10µm pitch

  • Calibration artifact, 180nm step height, 10µm pitch.

    This Bruker SurfaceTopography Reference Dies have a variety of step heights and pitches fordaily monitoring of SPM performance. The silicon die with patternedlayer of SiO2 is coated with Pt.

    All die are 8mm x 8mm and unmounted. They are not certified or traceable to NIST.

    Replaces model STR10-1800P.