21610-4

Ultra-Flat 4" Silicon Wafers


  • Ultra-Flat 4" Silicon Wafer for demanding substrate studies. Can also be used as substrate for AFM or SEM samples by dicing the wafer into smaller pieces using a Scriber and the Wafer Cleaving / Glass Breaking Pliers. The 4" ultra-flat silicon wafer is shipped in a 4" wafer carrier.

    Properties for 4" (100mm) Ultra-Flat Wafer:

    1. Orientation: <100>
    2. Type/Dopant: P/Boron
    3. Grade: Prime / CZ Virgin
    4. Resistivity: 10-20 Ohm-cm
    5. Thickness: 525µm +/- 20µm
    6. TTV: <4.00µm
    7. SFPD: <2.0µm
    8. Warp: ≤30µm
    9. Bow: ≤20µm
    10. Particles: ≤20@≥0.3µm
    11. Front Surface: Polished
    12. Back Surface: Etched
    13. Flat: 2 per SEMI Standard
    14. Site Flatness: <2.0µm
    15. Roughness: Typically 2-3Ã…