Ultra-Flat 4" Silicon Wafers

Ultra-Flat 4" Silicon Wafer for demanding substrate studies. Can also be used as substrate for AFM or SEM samples by dicing the wafer into smaller pieces using a Scriber and the Wafer Cleaving / Glass Breaking Pliers. The 4" ultra-flat silicon wafer is shipped in a 4" wafer carrier.

Properties for 4" (100mm) Ultra-Flat Wafer:

1. Orientation: <100>
2. Type/Dopant: P/Boron
3. Grade: Prime / CZ Virgin
4. Resistivity: 10-20 Ohm-cm
5. Thickness: 525µm +/- 20µm
6. TTV: <4.00µm
7. SFPD: <2.0µm
8. Warp: ≤30µm
9. Bow: ≤20µm
10. Particles: ≤20@≥0.3µm
11. Front Surface: Polished
12. Back Surface: Etched
13. Flat: 2 per SEMI Standard
14. Site Flatness: <2.0µm
15. Roughness: Typically 2-3Å