Your Cart is Empty
629-40
The TGT-1500 test grating is intended for SPM calibration in X- or Y-axis, determination of lateral and vertical scanner nonlinearity, detection of angular distortion and tip characterization. Nominal values for height and pitch are given below. Actual values come with the test grating.
| Structure: | Si wafer with grating in top surface |
| Pattern type: | 1-D array of triangular steps with precise linear and angular dimensions |
| Edge angle: | approximately 70 degrees |
| Edge Radius: | ≤10nm |
| Pattern Height: | 1.8µm - non-calibrated, for information only |
| Pitch: | 3 ±0.01µm |
| Chip size: | 5 x 5 x 0.5mm |
| Effective area: | Central square of 3 x 3mm |
Note: Values for step heights are nominal; actual step height is given with the product and could be ±5%