The TGT-1500 test grating is intended for SPM calibration in X- or Y-axis, determination of lateral and vertical scanner nonlinearity, detection of angular distortion and tip characterization. Nominal values for height and pitch are given below. Actual values come with the test grating.
|Si wafer with grating in top surface
|1-D array of triangular steps with precise linear and angular dimensions
|approximately 70 degrees
|1.8µm - non-calibrated, for information only
|5 x 5 x 0.5mm
|Central square of 3 x 3mm
Note: Values for step heights are nominal; actual step height is given with the product and could be ±5%