The TGT-1500 test grating is intended for SPM calibration in X- or Y-axis, determination of lateral and vertical scanner nonlinearity, detection of angular distortion and tip characterization. Nominal values for height and pitch are given below. Actual values come with the test grating.
|Structure:||Si wafer with grating in top surface|
|Pattern type:||1-D array of triangular steps with precise linear and angular dimensions|
|Edge angle:||approximately 70 degrees|
|Pattern Height:||1.8µm - non-calibrated, for information only|
|Chip size:||5 x 5 x 0.5mm|
|Effective area:||Central square of 3 x 3mm|
Note: Values for step heights are nominal; actual step height is given with the product and could be ±5%