Test Grating for Lateral Calibration


  • The TG3D-3000/600 test grating with its 3-Dimensional array is intended for lateral calibration of SPM scanners, detection of lateral nonlinearity, hysteresis, creep, cross-coupling effects and for determination of the tip aspect ratio.

    Structure: Si wafer with grating in top surface
    Pattern type: Chessboard like array of square pillars with sharp undercut edges
    Height: 0.3 - 0.6µm
    Top square size: 1.2 x 1.2µm
    Edge radius: ≤10nm
    Period: 3 ±0.05µm
    Chip size: 5 x 5 x 0.5mm
    Effective area: Central square of 3 x 3mm

    Note: Height and top square dimensions are given for information only (non calibrated values).