The TG3D-3000/600 test grating with its 3-Dimensional array is intended for lateral calibration of SPM scanners, detection of lateral nonlinearity, hysteresis, creep, cross-coupling effects and for determination of the tip aspect ratio.
|Structure:||Si wafer with grating in top surface|
|Pattern type:||Chessboard like array of square pillars with sharp undercut edges|
|Height:||0.3 - 0.6µm|
|Top square size:||1.2 x 1.2µm|
|Chip size:||5 x 5 x 0.5mm|
|Effective area:||Central square of 3 x 3mm|
Note: Height and top square dimensions are given for information only (non calibrated values).