The IMEC diamond AFM tips are made from solid boron-doped polycrystalline diamond. These extremely hard tips enable high-resolution electrical AFM measurements requiring high forces, such as Scanning Spreading Resistance Microscopy (SSRM) and other electrical and mechanical characterization methods. Each probe has three different cantilevers with distinct spring constants for ultimate versatility.
The tips are made of B-doped polycrystalline diamond in a pyramidal shape. The measured resistance of the diamond tips on a Platinum surface is between 10 and 1000 kOhm, depending on the tip radius. The electrical resolution can be below 1nm, as measured on a dedicated buried oxide sample in an optimized environment.
Each probe has three cantilevers with different spring constants covering a wide range of force constants, from 3 to 27 N/m. The Ni cantilevers are mounted on a metallized Si chip (3.4 x 1.6 x 0.4 mm).
Boron-doped polycrystalline diamond in a pyramidal shape.