6H-SiC (0001) based calibration sample which is designed to perform easy calibrations of an AFM scanner's vertical movements in several nanometers interval. The simplicity of calibration of the calibration process is provided by the nearly uniform distribution of half-monolayer high steps (either 0.75 or 1.5nm) on the sample surface demonstrating both chemical and mechanical stability. The step height corresponds to the half of the lattice constant of the 6H-SiC crystal in the (0001) direction.
|Specifications:||SiC / 0.75||SiC / 1.5|
|Structure:||SiC with Steps|
|Single Step Height:||0.75nm||1.5nm|
|Average Inter Step Distance:||0.15-0.4µm||0.2-0.5µm|
|Misorientation of Surface:||~0.2°||~0.3°|
|Average Roughness of Area Between Steps (terraces):||0.09nm|
|Chip Size:||5 x 5 x 0.3mm|