2.8N/m, 75kHz, 4 Sided Tip, Conductive PtSi Coating

  • Bruker SCM-PtSi Probes

    For the highest resolution nanoelectrical measurements with outstanding wear resistance.

    Bruker's new platinum silicide AFM probe is the ideal choice for Scanning Capacitance Microscopy measurements on the most advanced semiconductor features, providing the highest resolution imaging and long tip lifetime due to its outstanding wear resistant properties.

    The Bruker SCM-PtSi probe provides:

    • High resolution electrical imaging with an ultra-sharp conductive tip
    • Consistent performance with high measurement lifetime
    • Highly sensitive nanoelectrical measurements
    • High quality probe manufactured at Bruker AFM Probes
    • Other applications of the SCM-PtSi probe include: conductivity measurements Electrical Force Microscopy (EFM), and other characterization applications.

    Bruker Atomic Force Microscopy group also provides many other nano-electrical probes and modes for AFM based electrical measurements including the unique PeakForce KPFM and PeakForce TUNA modes.

  • Tip Geometry: Standard (Steep)
    Tip Height: 10 - 15
    Front Angle: 25 ± 2.5
    Back Angle: 17.5 ± 2.5
    Side Angle: 20 ± 2.5
    Tip Radius (Nom): 15
    Tip Radius (Max): 20
    Tip Coating: Conductive PtSi
    Tip Set Back (Nom): 15
    Tip Set Back( RNG): 5 - 25

  • Cantilever Material: 0.01 - 0.025 Ocm Antimony (n) doped Si
    Cantilever Thickness (Nom): 2.75
    Cantilever Thickness (RNG): 2.0 - 3.5
    Cantilever Geometry: Rectangular
    Cantilevers Number: 1
    Front Side Coating: Conductive PtSi
    Back Side Coating: Reflective Al