The innovative Pelcotec™ SFG12 finder grid substrate is a flat, conductive silicon substrate with a die size of 12.5 x 12.5mm. It is covered with a 1 x 1mm raster giving a total of 12x12=144 fields. Each field has a unique label using an alphanumeric pattern. The lines and labels are precision laser etched in the silicon surface. It is the best combination of a flat specimen support and an SEM finder grid.
This unique and innovative product has some resemblance with an engraved SEM specimen mount, but it has a number of additional advantages:
Specifications of the silicon substrate used: prime virgin silicon wafer, P Boron doped, <100> orientation, resistivity of 0.5-35 ohm/cm, thickness 645 µm ±55µm.