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683-01
NIST traceable with features from 2mm to 100nm for magnification 10-200,000x for SE, FESEM and FIB
Feature sizes: 2mm, 1mm, 0.5mm, 10µm, 5µm, 2µm, and 1µm, 500nm, 250nm, and 100nm
Unique, economically priced, yet fully featured and traceable calibration standards for a wide measurement range. They are made using the latest semiconductor and MEMS manufacturing techniques.
The Pelcotec™ CDMS Calibration Standard is available with two features size ranges, which are both offered as traceable and certified standards, making a total of 4 versions:
Pelcotec™ CDMS-1T; fully traceable with features from 2.0mm to 1um for a magnification range from 10x - 20,000x; ideal for desk top SEMs and low to medium magnification applications
Representative CDMS-1T Traceable Certificate (271KB PDF)
Pelcotec™ CDMS -0.1T; fully traceable with features from 2.0mm to 100nm for a magnification range up to 10 - 200,000x; for all SEM and most FESEM applications
Representative CDMS-0.1T Traceable Certificate (272KB PDF)
Pelcotec™ CDMS-1C; individually certified against a NIST standard with features from 2.0mm to 1µm for a magnification range from 10x - 20,000x; ideal for desk top SEMs and low to medium magnification applications
Representative CDMS-1C Conformance Certificate (190KB PDF)
Pelcotec™ CDMS-0.1C; individually certified against a NIST standard with features from 2.0mm to 100nm for a magnification range up to 10 - 200,000x; for all SEM and most FESEM applications
Representative CDMS-0.1C Conformance Certificate (190KB PDF)
Pelcotec™ Technical Notes for CDMS - Critical Dimension Magnification Standards (149KB PDF)
Comparison Table Below
| Pelcotec™ CDMS-1 | Pelcotec™ CDMS-0.1 | |
| Substrate: Silicon | ✓ | ✓ |
| Substrate size: 2.5 x 2.5mm | ✓ | ✓ |
| Substrate thickness: 675 ±10µm | ✓ | ✓ |
| Feature size: 2mm to 1µm | ✓ | ✓ |
| Feature size: 500, 250 and 100nm | — | ✓ |
| Feature material: 50nm Cr (2mm - 5µm) | ✓ | ✓ |
| Feature material: 20nm Cr/50nm Au (2µm and 1µm) | ✓ | ✓ |
| Feature material: 20nm Cr/50nm Au (500, 250 and 100 nm) | — | ✓ |
| NIST traceable | ✓ | ✓ |
| Certification available | ✓ | ✓ |
| Unmounted | ✓ | ✓ |
| Mounts A-R available | ✓ | ✓ |
| Precision better than 0.3% | ✓ | ✓ |
Feature sizes for the Pelcotec™ CDMS-1T and -1C are:
2mm, 1mm, 0.5mm, 0.25mm, 10µm, 5µm, 2µm and 1µm
Feature sizes for the Pelcotec™ CDMS-0.1T & 0.1C are:
2mm, 1mm, 0.5mm, 0.25mm, 10µm, 5µm, 2µm, 1µm, 500nm, 250nm and 100nm.
The Pelcotec™ CDMS Critical Dimensions and Magnification Standards are made on an ultra flat silicon substrate with a precise 50nm chromium deposition for the features up to 5µm and a combination of 50nm gold over 20nm chromium for the features sizes from 2µm to 100nm. The Cr and Au/Cr on Si provides excellent contrast both in SE and BSE imaging mode. The features are easier to determine than on etched Si standards. Since the silicon substrate, the chromium and the chromium/gold features are all conductive there are no charging issues with this calibration standard. Due to its sturdy construction the CDMS standard can be cleaned using a plasma cleaner.
The smaller features are nested for easy navigation and quick calibration. The accuracy of the features is 0.3% or better. The actual size of the standard is 2.5 x 2.5mm with a thickness of 675µm ±10µm. There is no coating on the Si surface. Each Pelcotec™ CDMS calibration standard has a unique identification number.
They are available either unmounted or mounted on SEM holders A-R. For AFM applications the Pelcotec™ CDMS is mounted on a 12mm AFM disc, for LM applications it is mounted on a 25 x 75mm glass slide.
The specimen may also be prepared on a custom mount of your choice.
Store the Pelcotec™ CDMS Calibration Standard in a vacuum desiccator such as the PELCO® SEM Sample Stub Vacuum Desiccator.