Sample with Al and Au line arrays for KPFM and EFM tests
Sample for KPFM and EFM tests featuring:
arrays with alternating Al and Au lines deposited on an oxide covered silicon substrate line array pitches of 4, 8, 20 and 40 micrometers line height of approx. 35 nanometers chip mounted on a 15 millimeter glass disc - metal disc stack thin silver plated copper wires connected to the Al and Au contact pads
Click here for a pdf file with KPFM & EFM Sample schematics.