E-Beam Lithography Mount

Interchangeable
Modular SEM Specimen Holders

This extensive line of specimen holders all have a female M4 thread and are compatible with all of our modular SEM Stage Adapters. If used with the Jeol or ZEISS/LEO dovetail stage adapter one of the adapter buttons 15372 or 15372-10 is needed.

E-Beam Lithography Mount, M4

The E-Beam Lithography Mount comprises:

1. 2 ea PELCO SEMClips™ to hold the sample
2. a Faraday cup (ø2.5mm with 100µm hole) to measure the beam current
3. and a gold on carbon resolution sample (ø3mm) for resolution test

All mounted on a 25mm aluminum cylinder stub positioned in such a way as to leave maximum sample space. The height of the gold on carbon test specimen is approximately 0.5mm above the surface of the mount. M4 threaded hole in bottom. Material: Aluminum with copper clips and brass screws. The Gold on Carbon is similar to #617 with gold particle size range from approximately 5nm to 150nm. Shipped in plastic storage box.

Extended Button (15372-10) is needed when used with the Dovetail Stage Adapters (15371 or 15397).

Screw used is M2 x 3mm, pan head screw, brass.