XYZ Calibration Nanogrid; Arrays with Down to 500nm Pitch; 20nm Height
Why XYZ Calibration Nanogrid? In order to make the most of their measurement capabilities, AFM systems need to be properly calibrated. The more accurate your calibration standard, the more accurate AFM measurement results can be achieved. In this respect, nanogrid calibration standards allow the most precise AFM system calibration.
The solution: CS-20NG is an advanced XYZ calibration nanogrid that enables calibration up to the nanometer level. It features silicon dioxide structure arrays on a 5x5 mm silicon chip. The fabrication process guarantees excellent uniformity of the structures across the chip. This in turn ensures easy and reliable X, Y and Z axis calibration of your AFM system.
The calibration area is situated in the center of the chip. It is easy to find with the AFM optical system.
The structure step height is in the range of 20 nm. The exact value for each chip is indicated on the box label. Arrays of structures with different shape and pitch are integrated on the chip. The large square (1x1 mm) contains square pillars and holes with a 10 um pitch. The middle square contains circular pillars and holes as well as lines in the X- and Y-direction with a 5 um pitch. The small square contains circular holes with a 500 nm pitch.
The CS-20NG is suitable for both lateral and vertical AFM scanner calibration. The structure symmetry makes it possible to calibrate your AFM system in one step without rotating the sample in-between X- and Y-axis calibration.
The CS-20NG chip is glued onto a 12 mm metal disc using a high-quality electrically conductive epoxy resin and it is ready for use as shipped. It is also available unmounted (CS-20NG-UM).
Technical data at a glance: Die size: 5x5mm
Step height: ~20nm (precise value indicated on the label of each box)
Structure geometry:
Square holes and pillars with 10µm pitch arranged in a 1x1mm square Circular pillars and holes, and lines in the x- and y- direction with a 5µm pitch arranged in a 500x500µm square Circular holes with a 500nm pitch arranged in a 100x100µm square
