Round Post Tips for Depth Metrology
Max W = 55 nm, Max EL = 700 nm
- Round Post Tips for Depth Metrology
Max Width = 55 nm
Max Effective Length = 700 nm
||Critical Dimension (Overhang)
| Tip Height:
||10 - 20
| Tip Set Back( RNG):
||5 - 15
- The Aluminum reflective coating on the backside of the cantilever increases the laser signal (A+B) by up to 2.5 times. It is to assist the machine vision application on Automated AFMs.
||0.010 - 0.025 Ωcm Silicon
| Cantilever Thickness (Nom):
| Cantilever Thickness (RNG):
||2.8 - 3.8
| Cantilever Geometry:
| Cantilevers Number:
| Back Side Coating:
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