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    Bruker’s Dektak® stylus profilometers deliver over five decades of innovation, offering precise, repeatable measurements for step height, 2D roughness, 3D mapping, and film stress. With 10,000+ systems worldwide, Dektak is the gold standard for thin film thickness, stress, and surface characterization across research and semiconductor applications.

    Products

    Dektak Pro
    • Direct-drive scan stage for accelerated measurement and analysis speed.
    • Vision64 software with 64-bit parallel processing for fast data processing.
    • Automated step height algorithms for consistent and error-free analysis.
    • Optical live image with enhanced field-of-view for easy feature location.
    • Better than 4 Å repeatability for unmatched accuracy in surface profiling.
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    Dektak XTL
    • Gage-capable QA/QC profiler optimized for 300 mm wafer and large-panel manufacturing.
    • Large-format sample handling up to 350 × 350 mm with fully enclosed, interlocked workstation.
    • Vision64 production interface enabling unlimited measurement sites and automated 3D mapping.
    • Dual-camera architecture with point-and-click positioning for rapid feature navigation.
    • Single-arch design with pneumatic vibration isolation and encoded XY stage for stable, high-throughput metrology.
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    Applications

    Not sure which system best fits your needs?

    Our team can help you compare options and determine the right configuration for your application.

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