KPFM-EFM-Sample

KPFM & EFM Sample

Sample with Al and Au line arrays for KPFM and EFM tests

  • Sample with Al and Au line arrays for KPFM and EFM tests

    Sample for KPFM and EFM tests featuring:

    arrays with alternating Al and Au lines deposited on an oxide covered silicon substrate
    line array pitches of 4, 8, 20 and 40 micrometers
    line height of approx. 35 nanometers
    chip mounted on a 15 millimeter glass disc - metal disc stack
    thin silver plated copper wires connected to the Al and Au contact pads