Calibration Artifact: 180nm Depth, 10μm Pitch, Pt-coated, mounted on a glass slide. These SPM Calibration Gratings are designed specifically for three dimensional monitoring and calibration of scanning probe microscopes. It is a reference artifact, where the specifications are met through tight manufacturing tolerances and not by individual per die measurements.
Veeco"s SPM Calibration Gratings are designed specifically for three dimensional monitoring and calibration of scanning probe microscopes. NanoDevices’ SPM Calibration Grating is a reference artifact, where the specifications are met through tight manufac
