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629-60
The TG3D-3000/600 test grating with its 3-Dimensional array is intended for lateral calibration of SPM scanners, detection of lateral nonlinearity, hysteresis, creep, cross-coupling effects and for determination of the tip aspect ratio.
| Structure: | Si wafer with grating in top surface |
| Pattern type: | Chessboard like array of square pillars with sharp undercut edges |
| Height: | 0.3 - 0.6µm |
| Top square size: | 1.2 x 1.2µm |
| Edge radius: | ≤10nm |
| Period: | 3 ±0.05µm |
| Chip size: | 5 x 5 x 0.5mm |
| Effective area: | Central square of 3 x 3mm |
Note: Height and top square dimensions are given for information only (non calibrated values).