PFDT2500

PFDT2500

High aspect ratio probe for repeatable, accurate depth metrology and imaging on challenging structures such as deep trenches and pits, as encountered on semiconductor samples and optics.
Designed for PeakForce Tapping operation on Dimension Icon.
2500nm tall spike with 30nm end radius and 150nm base width.

  • High aspect ratio probe for repeatable, accurate depth metrology and imaging on challenging structures such as deep trenches and pits, as encountered on semiconductor samples and optics.
    Designed for PeakForce Tapping operation on Dimension Icon.
    2500nm tall spike with 30nm end radius and 150nm base width

  • Tip Geometry: Rotated (Symmetric)
    Tip Height: 3 - 8
    Front Angle: 15+/-2
    Back Angle: 25+/-2
    Side Angle: 17.5+/-2
    Tip Radius (Nom): 30
    Tip Coating: None
    Tilt Compensation: 12

  • Cantilever Thickness (Nom): 500
    Cantilever Thickness (RNG): 470-530
    Cantilever Geometry: Special
    Cantilevers Number: 1
    Back Side Coating: Reflective Aluminum