CDR140
Tip Geometry: | Critical Dimension (Overhang) |
Tip Height: | 10 - 20 |
Tip Set Back( RNG): | 5 - 15 |
Tilt Compensation: | cell2 |
Cantilever Material: | 0.010 - 0.025 Ωcm Silicon |
Cantilever Thickness (Nom): | 3.3 |
Cantilever Thickness (RNG): | 2.8 - 3.8 |
Cantilever Geometry: | Rectangular |
Cantilevers Number: | 1 |
Back Side Coating: | Reflective Aluminum |