EBD-CDR50

$4,260.00

50NM W FULL CARBON CD PROBE, 5PK

DESCRIPTION
TIP SPECIFICATIONS
CANTILEVER SPECIFICATIONS

The EBD-CDR probes for 3D reference and hybrid metrology: witha full range of EBD-CDR probes from 130 nm down to 15 nm, this ispushing the limits of 3D-AFM technology for measuring tight dimensionsand extending its capability for future nodes. It brings EBD´skey strength: precise tip orientation, precise control in tip dimensions(length, total diameter, vertical edge height, overhang) and largevolumeproduction to undercut applications. These tips do not have a wearresistance coating - butmade from bulk wear resistance diamond like carbon.
50 nm full carbon CD probe. Low vertical edge height, constant edge radius maintains resolution over tip life.

Tip Geometry: Critical Dimension (Overhang)

Tip Height: 10 - 15

Tip Radius (Max): <10

Tip Set Back (Nom): 15

Tip Set Back( RNG): 5 - 25

Tilt Compensation: 3

Aluminum reflective coating on the backside of the cantilever. The Al Reflective coating increases the laser signal (A+B) by up to 2.5 times. Although not necessary for general imaging, reflective coating is recommended for thin cantilevers, highly reflective samples, and machine vision applications.

Cantilever Material:	0.01 - 0.025Ωcm Antimony (n) doped Si
Cantilever Thickness (Nom):	1 - 2
Cantilever Thickness (RNG):	3.0-4.5
Cantilever Geometry:	Rectangular
Back Side Coating:	Reflective Aluminum

Tip Geometry:	Critical Dimension (Overhang)
Tip Height:	10 - 15
Tip Radius (Max):	<10
Tip Set Back (Nom):	15
Tip Set Back( RNG):	5 - 25
Tilt Compensation:	3